EFFECTS OF PLASMA PARAMETERS ON THE PROPERTIES OF La1-xSrxMnO3 THIN LAYERS DEPOSITED IN LOW-PRESSURE RF PLASMA WAVE SHOCK REACTOR

Nickravech, M.; Rousseau, F.; Morvan, Daniel; Amouroux, Jacques

Progress in Plasma Processing of Materials, 2003

ISBN Imprimir: 978-1-56700-192-1

ISBN On-line: 978-1-56700-447-2

EFFECTS OF PLASMA PARAMETERS ON THE PROPERTIES OF La_1-xSr_xMnO₃ THIN LAYERS DEPOSITED IN LOW-PRESSURE RF PLASMA WAVE SHOCK REACTOR

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M. Nickravech Laboratoire de Génie des Procédés Plasmas et Traitement de Surface − Université Pierre et Marie Curie − Paris 6 - ENSCP, 11, rue Pierre et Marie Curie, 75231 Paris Cedex 05, France

F. Rousseau Laboratoire de Génie des Procédés Plasmas et Traitement de Surface − Université Pierre et Marie Curie − Paris 6 - ENSCP, 11, rue Pierre et Marie Curie, 75231 Paris Cedex 05, France

Daniel Morvan Laboratoire de Genie des Precedes Plasmas Universite P. et M. Curie, ENSCP 11 rue P. et M. Curie 75005 Paris France

Jacques Amouroux Laboratoire de Genie des Precedes Plasmas Universite P. et M. Curie, ENSCP 11 rue P. et M. Curie 75005 Paris France

Resumo

Deposits of La_1-xSr_xMn0_3±δ used as cathode materials in solid oxide fuel ceils are obtained by oxidation of nitrate precursors in a low pressure RF plasma reactor equipped with a convergent nozzle. Impedance measurements showed the role of plasma parameters on the electrical conductivity of deposits. Infrared analysis of deposits permitted to measure the role of plasma parameters on the conversion rate of nitrate precursors. Oxygen and hydroxyl radicals produced by plasma are found to be the major reactive species that lead to the oxidation of nitrate precursors in this process.

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