Авторы, Редакторы, Рецензенты

J. Zila

Department of Physical Electronics, Masaryk University Kotlarska 2, 611 37 Brno, Czech Republic
Больше информации об авторе - в Directory of Specialists

Articles

REDUCTION OF TUNGSTEN PRECURSORS IN INDUCTIVELY COUPLED RF DISCHARGE Vol. 0 '2003 - Progress in Plasma Processing of Materials, 2003