Facing with the rapid changing world market, many enterprises are considering and implementing CIM(Computer Integrated Manufacturing). Different computer aided technologies have been introduced to industries. However, introducing only those component technologies can not significantly enhance their competitive abilities. The more important thing is to do system integration, that is, considering the integration of technology, people and business from the viewpoint of global system. The modeling analysis of this problem is so called CIM system architecture. This paper will first introduce some major existing CIM system architectures, including CIM-OSA GRAI-GIM and PERA. Then, based on the requirements from industry, a new scheme of stair-like CIM system architecture with six different views and five development stages is proposed, and its suitability for industrial application is described.