Progress in Plasma Processing of Materials, 1997
ISBN Print: 1-56700-093-2
RECOMBINATION AND DIFFUSION IN AN INDUCTIVELY COUPLED ARGON PLASMA DURING POWER INTERRUPTION
DOI: 10.1615/ITPPC-1996.210
pages 165-173
Аннотация
The temporal behavior of the electron density ne and temperature Te during the power interruption of an inductively coupled plasma (ICP) is measured.
The simulation of ne as a function of time using a one-dimensional model including ambipolar diffusion and three particle recombination fits the measurements in the inner part (50% of the radius) of the plasma. However, for the measured fast ne−decay observed at the outer part of the plasma other processes must be reponsible.
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