Progress in Plasma Processing of Materials, 1999

ISBN Print: 1-56700-126-2

ENERGETIC PROPERTIES OF THE EXTENDED NEGATIVE GLOW IN THE IMPEDED N2 DISCHARGE.

DOI: 10.1615/ITPPC-1998.940
pages 637-641

Аннотация

The electrical discharge system with electrodes made as alternating bars and rings was found to form an impeded glow discharge with extended negative glow which can be the source of extra higher energy electrons. The electron probe functions of N2 plasma show the enrichment of the higher energy region with electrons. Emission spectrum of this glow was obtained and compared with that of usual plane parallel diode, this demonstrating the radiation enrichment of UV region in the former case. Application of the impeded discharge for N2 dissociation and other plasma chemical processes are discussed.