Progress in Plasma Processing of Materials, 1999

ISBN Print: 1-56700-126-2

HYPERBOLOID MASS SPECTROMETER WITH ONE-DIMENSIONAL ION SORTING FOR DIAGNOSTICS OF A PLASMA

DOI: 10.1615/ITPPC-1998.400
pages 265-270

Аннотация

A new hyperboloid mass spectrometer with ion separation along one axis was examined. The electrode system consists of two electrodes, each of these has accurately machined hyperbolic internal surfaces, with a shielding electrode. An impulse signal is used, which provides phase ion injection into a field free volume of the analyser. An estimated trapping coefficient of analysed ions and a sorting rate predict high efficiency of the suggested separation method and its capabilities. The achieved mass resolution is about 103.