Progress in Plasma Processing of Materials, 2003
ISBN Print: 978-1-56700-192-1
ISBN Online: 978-1-56700-447-2
DEPOSITION OF COATINGS BY A JET RF-PLASMA OF LOW PRESSURE
DOI: 10.1615/ITPPC-2002.640
pages 515-521
Résumé
Were investigated basic electrophysical and mechanical characteristics of a dielectric and metal films.
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