Autores, editores e revisores da Begell House

E. Katsia

Plasma Technology Lab, Dept. Chem. Engineering, University of Patras, P.O.Box 1407, 26500 Patra, Greece
Obtenha mais informações sobre o autor no Diretório de especialistas

Articles

INFLUENCE OF NEGATIVE SUBSTRATE BIAS ON PLASMA PROPERTIES AND SILICON FILM DEPOSITION RATE Vol. 11 '2007 - High Temperature Material Processes: An International Quarterly of High-Technology Plasma Processes